Equipment Processing State Model

SEMI E30 Sections:	3.4
Database Usage:
Documentation Requirements:	The Equipment Processing State model is described in this manual.

 

The equipment processing state model corresponds to AIM sequence processing states (running, paused, idle, etc.). A state model is maintained for each executing task and separate equipment constants are maintained for the current and previous process states of all tasks. When a state change occurs in the equipment processing state model, DVVAL 9210 is updated with the number of the task that transitioned (see Predefined Collection Events for the VIDs used in this state model).

Equipment Processing State Model illustrates the state changes that occur during processing. Equipment processing state model transitions are based on state transitions caused by AIM control statements such as START_TASK and PAUSE_TASK.

Figure 2-1. Equipment Processing State Model

Equipment Processing State Model Transitions describes the possible transitions in the equipment processing state model illustrated above.

Table 2-1. Equipment Processing State Model Transitions

#	Current State	Trigger	New State	Action	Comments
1	INIT	AIM started	IDLE	None	This state is not recorded since this transition takes place before the AdeptGEM system can be in the communication state.
2	IDLE	Sequence is started	RUNNING	None
3	RUNNING	A sequence is STOPPED	IDLE	None
4	RUNNING	A PAUSE_TASK statement is processed	PAUSED	None
5	PAUSED	A RESUME_TASK statement instruction is processed	RUNNING	None	An uncleared error will cause an immediate return to PAUSED.
6	PAUSED	A TEACH button is chosen	TEACHING	None
7	TEACHING	The TEACH routine completed	PAUSED	None
8	PAUSED	A sequence is STOPPED	IDLE	None

Current State Status Variables

The current state of the equipment process state for task 0 is stored in status variable 9007 in the GEM Variables database. The previous equipment processing state for task 0 is stored in status variable 9006. The current and previous states of the other 27 tasks are stored in status variables 9021 to 9074. The possible states are:

• INIT (not recorded, state change occurs before communications
  enabled)
• IDLE (status variable = 3)
• RUNNING (status variable = 0)
• PAUSED (status variable = 2)
• TEACH (status variable = 1)

Host-Initiated S1,F13/F14 Scenario

SEMI E30 Sections:

4.1.5.1

Database Usage:	None.
Documentation Requirements:	This manual provides all required documentation.

This is a SECS-II level "establish communications" capability in which the host attempts to establish communication with the equipment. These attempts to establish communication are handled automatically by AdeptGEM, and the results are displayed on the GEM Control Panel (see GEM Control Panel, Establish Communication Options).