Control (Host-Initiated)

SEMI E30 Sections:	4.12
Database Usage:
Documentation Requirements:	None

This section describes the Control state model that implements both the Operator-Initiated Control Requirement and the Host-Initiated Control Capability

The Control state that is selected during system initialization is specified by equipment constants (ECID 9103 and 9155). Changes to the Control state are made at the equipment from the GEM Control Panel (see GEM Control Panel, Control State Model Options). Host changes to the Control state are made automatically and reflected on the control panel. This control panel must be used when SEMI compliant operation is required. To display the GEM Control Panel:

Show -> GEM Control Panel

Figure 3-4. GEM Control Panel, Control State Model Options

Before changes can be made to the Control state, communications must be enabled.

Choosing Off-Line when the system state is ON-LINE will initiate the scenario that attempts to bring the equipment OFF-LINE. If the host accepts the off-line request, the equipment will transition to the OFF-LINE state and the new state will be displayed at the bottom of the "Control" group. When the equipment is off-line, it will respond only to host messages that request activation of the on-line state.1 An SxF0 reply will be made to all other messages.

Choosing On-Line when the system state is OFF-LINE will initiate the scenario that attempts to bring the equipment ON-LINE. If the host accepts the on-line request, the equipment will transition to the ON-LINE state and the new state will be displayed at the bottom of the "Control" group. The host can request a transition to the HOST OFF-LINE state. Once in the HOST OFF-LINE state, the host can also initiate a request for the equipment to go on-line. If the equipment accepts the host request, the new state will be displayed at the bottom of the "Control" group.

There are two sub-states of the ON-LINE state, REMOTE and LOCAL. When the state is LOCAL, the operator still controls the equipment and the host has the following options and prohibitions:

• The host cannot initiate a process or modify a running process.

• The host cannot modify any EC related to a running process (as specified by the Process Related option) but can modify ECs while no process is running.

• The host cannot select processes for execution.

• The host can request upload and download of process programs.

• The host can configure alarms, event reporting, and trace data reporting.

• The host can request and receive all data reports.

• The host can perform terminal messages operations.

When the state is REMOTE the host can operate the equipment to the full extent described in this documentation. The equipment can be set up to allow or disallow the following operator actions. The recommended setting is in the second column. See VIDs 9118 to 9131 for the current settings of these restrictions.

Class of Operations	Recommended in REMOTE Mode?
Change process-related equipment constants	NO
Change non-process related equipment constants	YES
Initiate process program download	YES
Select Process Program	NO
Start Process Program	NO
Pause/Resume Process Program	NO
Operator Assist	YES
Material Movement to/from equipment	NA
Equipment-specific commands	NA

GEM Requirements

These GEM requirements are specified in Section 4.12.4 of SEMI E30:

1. The default control state entered on system initialization can be configured in the GEM Variables database (ECID 9103 and 9155).

2. The state activated when an attempt to go ON-LINE fails can be configured in the GEM Variables database (ECID 9104).

3. The ON-LINE/OFF-LINE buttons on the GEM Control Panel shown in GEM Control Panel, Control State Model Options mimic momentary switches. These buttons serve to transition between on-line and off-line.

4. The ON-LINE REMOTE/LOCAL switches are radio buttons on the GEM Control Panel shown in GEM Control Panel, Control State Model Options.

5. The control state is displayed in a permanent information area of the GEM Control Panel shown in GEM Control Panel, Control State Model Options.

6. The status variable that maintains the status of the control state model is stored in a record in the GEM Variables database (SVID 9003).

7. The "operator command issued" event is stored in a record in the GEM Items database (CEID 9004).

1

Note that "equipment off-line" does not physically break the communication link with the host. The host can still transmit messages, and the equipment will respond with the appropriate message indicating that communication is disabled.